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MicroNano: Micro- and Nanoelectromechanical Systems

The MicroNano research group primarily focuses on research topics related to applications using advanced micro- and nanotechnologies.


Our main research focus is using micro- and nanotechnologies for devices and prosess technologies to the advance of electronic sensors, actuators and systems used in industrial instrumentation, environment control, health care, maritime and oil&gas applications; Examples are: Micro energy harvesters for wireless systems, micro energy storage devices, cryogenic optoelectronic packaging, non-invasive blood glucos sensors, carbon dioxide blood gas sensors, humidity sensors in buildings and terahertz  imaging and spectroscopy.

The group contributes to teaching and supervision activities for the HSN bachelor-, master- and PhD programmes within micro- and nanotechnologies. The R&D projects in the group use in-house laboratory resources of the MST-Lab at HSN, the Norfab resources and laboratory resources at international partners. This means we can perform or get performed laboratory experiments with a wide range of advanced laboratory equipment, for prototype fabrication and for analysis.

Current Networks and Partners

  • Academic networks and partners: University of Oslo, Norwegian University of Science and Technology (NTNU), Norwegian Institute of Metrology (Justervesenet)  University of Southern California, University of Illinois, UC Berkeley, KTH, Uppsala University, Chalmers institute of Technology, PTB, Germany, TU Ilmenau, Germany, NPL, UK, VTT, Finland, INSA Lyon, France, ESIEE, Paris, Shanxi University, China, Taiyuan Un of Technology, China.
  • Industrial collaborations: Kongsberg Norspace AS, Sensocure, Memscap, poLIGHT, Aiwell, Barco Projection Design, Kongsberg Maritime, Kongsberg Norspace.

Current Projects

  • Nfr ENERGIX Integrated Micro Power Harvesters
  • EU Cryogenic Optoelectronics
  • Nfr Beat The Human Eye
  • Nfr BIA Barco Projection Design

Current PhD projects

  • Bjørnar Karlsen: "Design of optically controlled AC Josephson arrays and voltage dividers for high precision voltage metrology"

Research group members