The Cleanroom (ISO 5) spans 400 square meters and includes advanced equipment for deposition, patterning, etching, assembly and interconnection. Additionally, the Department of Microsystems has laboratories for materials processing and characterization and for electrical and optical measurements, and Bio-MEMS laboratories for research on biological systems. There is also equipment available for basic environmental testing of electronics.
MST-Lab is part of the Norwegian Micro- and Nanofabrication Facility (NorFab) and CC-NorChip, the Norwegian competence center for chip and sensor technologies, together with NTNU NanoLab, UiO MiNaLab and SINTEF MiNaLab.