Micro- and Nanoelectromechanical Systems (MNEMS) Research Group

Our main research focus is using micro- and nanotechnologies for devices and process technologies to the advance of electronic sensors, actuators and systems used in industrial instrumentation, environment control, health care, maritime and oil & gas applications.

Examples are: Micro energy harvesters for wireless systems, micro energy storage devices and wireless power transfer. Graphene forest and interconnect cross-linked CNTs (patented) for supercapacitors of high energy density. Ultrasound sensor technology for use in health care, maritime and NDT, RF acoustic sensors and resonators including Bulk Acoustic Wave (BAW) resonators, Thin Film Bulk Wave Acoustic Resonators (FBAR) and Surface Acoustic Wave (SAW) sensors, ultrathin MEMS microphone for air dynamic study.

Micro/nano featured electrode for bio-electrochemical systems such as Power-to-X for CO2 recycling, waste to energy, and energy storage, cryogenic optoelectronic packaging, non-invasive blood glucose sensors, carbon dioxide blood gas sensors and humidity sensors in buildings. Optics for laser projectors, mobile phone camera lenses, statistical optics phenomenon in coherent imaging, computational imaging, efficient nanocomposite materials for solid-state lighting, vacuum MEMS devices and semiconductor lasers & devices for extreme high frequency (Terahertz) applications.

The group contributes to teaching and supervision activities for the USN bachelor, master and PhD programs within micro- and nanotechnologies and other engineering programs. The R&D projects in the group use in-house laboratory resources of the MST-Lab at USN, the Norfab resources and laboratory resources at international partners. This means we can perform or have laboratory experiments performed with a wide range of advanced laboratory equipment, for prototype fabrication and for analysis.

We are working closely with industrial companies in our region, and have strong collaborations with academic and industrial partners, both domestically and internationally. Our aim is to be a critical competence partner for the industry.

Projects