Micro- and Nanoelectromechanical Systems (MNEMS)

The research group primarily focuses on research topics related to devices and systems using micro- and nanotechnologies.

Our main research focus is using micro- and nanotechnologies for devices and process technologies to the advance of electronic sensors, actuators and systems used in industrial instrumentation, environment control, health care, maritime and oil&gas applications. Examples are: Micro energy harvesters for wireless systems, micro energy storage devices and wireless power transfer. Ultrasound solutions for health care, RF acoustic sensors and resonators including Bulk Acoustic Wave (BAW) resonators, Thin Film Bulk Wave Acoustic Resonators (FBAR) and Surface Acoustic Wave (SAW) sensors. Micro/nano featured electrode for bio-electrochemical systems, cryogenic optoelectronic packaging, non-invasive blood glucose sensors, carbon dioxide blood gas sensors and humidity sensors in buildings. Optics for laser projectors, mobile phone camera lenses, statistical optics phenomenon in coherent imaging, efficient materials for solid-state lighting, semiconductor lasers and devices for extreme high frequency (Terahertz) applications.

The group contributes to teaching and supervision activities for the USN bachelor-, master- and PhD programs within micro- and nanotechnologies and other engineering programs. The R&D projects in the group use in-house laboratory resources of the MST-Lab at USN, the Norfab resources and laboratory resources at international partners. This means we can perform or have laboratory experiments performed with a wide range of advanced laboratory equipment, for prototype fabrication and for analysis.

We are working closely with industrial companies in our local area, and have strong collaborations with academic and industrial partners, both domestically and internationally. Our aim is to be a critical competence partner for the industry.

Projects (active)

  • EU APPLAUSE Advanced packaging for photonics, optics and electronics for low cost manufacturing in Europe
  • RCN – SYNKNOYT COMPMIC (Computational Fourier Ptychographic microscopy)
  • RCN - FRINATEK Computational Microscopy of Porous Materials
  • RCN - PROFESJON Advanced Piezoelectric Devices
  • EU EMPIR QuADC Cryogenic Optoelectronics
  • RCN - BIA HILASE, Barco Projection Design
  • RCN - SFI CIUS (Center for Innovative Ultrasound Solutions)
  • Oslofjord preproject - AlN SAW
  • SIU NFR InCoNUS International Exchange
  • NFR FORNY Supercapacitors

Projects (completed)

  • NFR - ENERGIX Integrated Micro Power Harvesters
  • NFR - BIA Beat The Human Eye
  • Innovation Norway – Sensocure Multisensor unit

Post Docs

  • Eivind Bardalen: Cryogenic Packaging
  • Kang Du: Supercapacitors
  • Hamed Salmani: Piezoelectric Microactuators

On-going PhD projects

Ultrasound applications

  • Per Kristian Bolstad: “Ultrasound Transducers for Harsh Environments”.
  • Ellen K. S. Røed: “New active materials in underwater transducers”.
  • Kenneth K Andersen, Multi-band transducers for medical applications – Industrial partner: Phoenix Solutions.
  • Thuy Thu Nguyen, “Layer-specific Strain and Strain Rate Estimation u sing Miniature Transducers Attached to the Epicardium”.
  • Thong Tuan Huynh, Non-ideal effects in transducers – Industrial partner: GE Vingmed Ultrasound.

Optics and Photonics

  • Mojde Hasanzade: “High Resolution Fourier Ptychographic Microscopy”.
  • Ahmet Burak Cunbul: “Novel optical engines for UHD, 4K DMD laser/phosphor projectors”.
  • Svein Arne Jervell Hansen, Superimposition enhancements and its evaluation methods in high resolution laser projectors.

Energy storage and harvesting

  • Binh Duc Truong: "Approaching theoretical power bounds for vibration energy harvesters".
  • Yingge Wang: “Nano featured electrode for high energy density supercapacitors”.
  • Xiao Fan: ”Nano composite material for Supercapacitor of high energy density”.
  • Chengjun Yu: ”Low dimensional material for Supercapacitors with improved energy density”.

Piezoelectric devices

  • Arian Nowbahari: "Advanced Power Management Circuits for Piezoelectric Wireless Energy Transfer".
  • Mahmoud Ahmed Farghaly Abdelmeguid: "Design concepts for novel MEMS autofocus lenses".
  • Trinh Bich Hoang, Development of acoustic wave biosensor for glucose monitoring.


  • Phillip Alexander Hetland Papatzacos: "Wafer-Level Packaging for Infrared Microbolometers".
  • Hexin Xia: "Hermetic water-level Bonding for Uncooled Microbolometer FPAs".
  • Huyen T. Nguyen: “MEMS logic for extreme temperature applications”.
  • Yelzhas Zhaksylyk:”An electronic interface for wireless power transmission”.

Networks and Partners

Academic networks

  • University of Oslo
  • Norwegian University of Science and Technology (NTNU)
  • Norwegian Institute of Metrology (Justervesenet) 
  • University of Southern California
  • University of Illinois
  • UC Berkeley
  • KTH, Stockholm
  • EPFL, Lausanne
  • Uppsala University
  • Chalmers institute of Technology
  • PTB, Germany
  • TU Ilmenau, Germany
  • NPL, UK
  • VTT, Finland
  • INSA Lyon, France
  • ESIEE, Paris
  • Shanxi University, China
  • Taiyuan Un of Technology, China

Industrial collaborations

  • Kongsberg Norspace AS
  • Sensocure
  • Memscap
  • Polight
  • Aiwell
  • Barco Projection Design
  • Kongsberg Maritime
  • Unilabs
  • GE Vingmed Ultrasound
  • GE Parallel Design SA
  • Phoenix Solutions
  • ELKEM Silicon Materials